THERMAL DECOMPOSITION OF INDIUM PHOSPHIDE IN VACUUM AND ATOMIC HYDROGEN ENVIRONMENT

Authors

  • V. I. Gorbenko Classical Private University, Ukraine
  • A. N. Gorban Classical Private University, Ukraine

DOI:

https://doi.org/10.15588/1607-3274-2012-1-1

Keywords:

indium phosphide, atomic hydrogen, thermal decomposition, scanning electron microscopy.

Abstract

The thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass-spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role of atomic hydrogen in processes of decomposition and growth of metallic islands was determined bycomparing with these processes under vacuum.

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Published

2012-07-25

How to Cite

Gorbenko, V. I., & Gorban, A. N. (2012). THERMAL DECOMPOSITION OF INDIUM PHOSPHIDE IN VACUUM AND ATOMIC HYDROGEN ENVIRONMENT. Radio Electronics, Computer Science, Control, (1). https://doi.org/10.15588/1607-3274-2012-1-1