THERMAL DECOMPOSITION OF INDIUM PHOSPHIDE IN VACUUM AND ATOMIC HYDROGEN ENVIRONMENT

V. I. Gorbenko, A. N. Gorban

Abstract


The thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass-spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role of atomic hydrogen in processes of decomposition and growth of metallic islands was determined bycomparing with these processes under vacuum.

Keywords


indium phosphide, atomic hydrogen, thermal decomposition, scanning electron microscopy.

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DOI: http://dx.doi.org/10.15588/1607-3274-2012-1-1



Copyright (c) 2014 V. I. Gorbenko, A. N. Gorban

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