V. I. Gorbenko, A. N. Gorban


The thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass-spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role of atomic hydrogen in processes of decomposition and growth of metallic islands was determined bycomparing with these processes under vacuum.


indium phosphide, atomic hydrogen, thermal decomposition, scanning electron microscopy.


M’hamedi, O. Interaction of atomic hydrogen with cleaved

InP. I. The adsorption stage / M’hamedi O., Proix F., Sebenne

C. A. // Journal of Vacuum Science and Technology A. – 1988. – Vol. 6, № 2. – Р. 193–198.

Proix, F. Interaction of atomic hydrogen with cleaved InP. II. The

decomposition stage / Proix F., M’hamedi O., Sebenne C. A. //

Journal of Vacuum Science and Technology A. – 1988.– Vol. 6, № 2. – Р. 199–203.

Proix, F. Dissociation effects of H and H2 + on clean III–V

compounds / Proix F. // Physica B. – 1991. – № 170. – Р. 457–

Schaefer, J. A. Atomic hydrogen – a local probe for interface characterization / Schaefer J. A. // Surface Science. – 1987. –

№ 189/190. – Р. 127–136.

Gorbenko, V. Oxidation and metallization in H2/H2O/InP system / Gorbenko V., Shvets J., and Gorban A. // Proceedings of the Twenty-Seventh State-of-The-Art Program On Compound Semiconductors (SOTAPOCS XXVII) by editors

S. N. G.Chu, D. N. Buckley, K. Wada et. al. Vol. 97 21. – The Electrochemical Society, Pennington, 1997. – P. 375–381.

Panish, M. B. Phase equilibria and vapor pressures of the system In+P / Panish M. B., Arthur J. R. // J. Chem. Thermodynamics. – 1970. – vol. 2, № 3. – P. 299–318.

GOST Style Citations

Copyright (c) 2014 V. I. Gorbenko, A. N. Gorban

Creative Commons License
This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.

Address of the journal editorial office:
Editorial office of the journal «Radio Electronics, Computer Science, Control»,
National University "Zaporizhzhia Polytechnic", 
Zhukovskogo street, 64, Zaporizhzhia, 69063, Ukraine. 
Telephone: +38-061-769-82-96 – the Editing and Publishing Department.

The reference to the journal is obligatory in the cases of complete or partial use of its materials.