AGENT-BASED MODELING OF MULTICLUSTER TECHNOLOGICAL COMPLEXES OF NANOELECTRONIC MANUFACTURING
manufacturing is carried out, an approach to improve the performance of automated cluster-based equipment in semiconductor manufacturing
based on control flow of semi-finished products is proposed. A simulation model for the analysis of control flow processes of semi-finished products and calculation of nanoelectronic manufacturing characteristics, which allows you to search for rational decisions related to the control flows of semi-finished products in multicluster technological complexes of any architecture, taking into account resource constraints and risk factors also proposed in this article.
The model is based on multi-agent approach, which provides the following benefits: autonomy and individual behavior of model elements
(agents), agents are able to adapt and change their behavior, have a dynamic relationship with other agents that can be configured to disappear in the process of modeling and other. The developed agent-based simulation model takes into account the complex dynamics of nanoelectronic manufacturing and provides a simulation multicluster technological complexes of different topologies and implements a variety of strategies and control algorithms by flows of semi-finished products. Formulations of the problems of movements planning of semi-finished products in multicluster technological complexes associated with the various strategies and performance criteria for nanoelectronic manufacturing logistics are formulated within the paper.
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