AGENT-BASED MODELING OF MULTICLUSTER TECHNOLOGICAL COMPLEXES OF NANOELECTRONIC MANUFACTURING
manufacturing is carried out, an approach to improve the performance of automated cluster-based equipment in semiconductor manufacturing
based on control flow of semi-finished products is proposed. A simulation model for the analysis of control flow processes of semi-finished products and calculation of nanoelectronic manufacturing characteristics, which allows you to search for rational decisions related to the control flows of semi-finished products in multicluster technological complexes of any architecture, taking into account resource constraints and risk factors also proposed in this article.
The model is based on multi-agent approach, which provides the following benefits: autonomy and individual behavior of model elements
(agents), agents are able to adapt and change their behavior, have a dynamic relationship with other agents that can be configured to disappear in the process of modeling and other. The developed agent-based simulation model takes into account the complex dynamics of nanoelectronic manufacturing and provides a simulation multicluster technological complexes of different topologies and implements a variety of strategies and control algorithms by flows of semi-finished products. Formulations of the problems of movements planning of semi-finished products in multicluster technological complexes associated with the various strategies and performance criteria for nanoelectronic manufacturing logistics are formulated within the paper.
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Шишмарев В. Ю. Организация и планирование автоматизированных производств : учебник / В. Ю. Шишмарев. – М. : Академия, 2013. – 304 с. 2. Mohammad I. Handbook of sensor networks : compact wireless and wired sensing systems / edited by Mohammad Ilyas Mohammad and Imad Mahgoub. – Boca Raton, Florida : CRC Press LLC, 2005. – 776 p. 3. Lopez M. J. Systems of multiple cluster tools: configuration, reliability, and performance / M. J. Lopez, S. C. Wood // IEEE Trans. on Semiconductor Manufacturing. – 2003. – Vol. 16, № 2. – P. 170–178. 4. Акопов, А. С. Имитационное моделирование : учебник и практикум для академического бакалавриата / А. С. Акопов ; Высшая школа экономики (ВШЭ), Национальный исследовательский университет (НИУ). – Москва : Юрайт, 2015. – 389 с. 5. Challenges and Solution Approaches for the Online Simulation of Semiconductor Wafer Fabs / [D. Noack, M. Mosinski, O. Rose, P. Lendermann, and B. P. Gan] // Winter Simulation Conference : The premier international conference for simulation professionals in discrete and combined discrete-continuous simulation, AZ, USA, 11–14 December 2011 : proceedings. – Phoenix : WSC, 2011. – P. 1845–1856. 6. Uhlig T. Simulation-based optimization for groups of cluster tools in semiconductor manufacturing using simulated annealing / T. Uhlig, O. Rose // Winter Simulation Conference : The premier international conference for simulation professionals in discrete and combined discrete-continuous simulation, AZ, USA, 11–14 December 2011 : proceedings. – Phoenix : WSC, 2011. – P. 1857–1868. 7. Towards Realization of a High-Fidelity Simulation Model for Short-Term Horizon Forecasting in Wafer Fabrication Facilities / [W. Scholl, B. P. Gan, M. L. Peh and other] // Winter Simulation Conference : The premier international forum for disseminating recent advances in the field of system simulation, MD, USA, 05–08 December 2010 : proceedings. – Baltimore : WSC, 2010. – P. 2563–2574. 8. Zuberek W. M. Cluster tools with chamber revisiting – Modeling and analysis using timed Petri nets / W. M. Zuberek // IEEE Transactions on semiconductor manufacturing. – 2004. – Vol. 17, № 3. – P. 333–344. 9. Throughput Analysis of Linear Cluster Tools / [J. Yi, S. Ding, M. T. Zhang, V. D. Meulen] // IEEE International Conference on Automation Science and Engineering: International Conference, AZ, USA, 22–25 September 2007 : proceedings. – Scottsdale : IEEE, 2007. – P. 1063–1068. 10. Varadarajan A. A survey of dispatching rules for operational control in wafer Fabrication / A. Varadarajan, S. C. Sarin // Information Control Problems in Manufacturing: The 12th IFAC International Symposium, France, 17–19 May 2006 : proceedings. – Saint Etienne : ELSEVIER, 2006. – P. 709–720. 11. Wang P. Hybrid Model applied in the Semiconductor Production Planning / P. Wang, T. Murata // International MultiConference of Engineers and Computer Scientists: International MultiConference, China, 13–15 March 2013 : proceedings. – Hong Kong : Newswood Limited, 2013. – P. 964–968.
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